NDT4Industry

Metrology and material characterization of Microelectromechanical Systems (MEMS) with high frequency ultrasound

  • Dr. Martin Ryzy
    Senior Scientist Acoustics, RECENDT

Talk will be held in English – or potentially in German if only German speaking listeners are participating!
Webinar will be offered as ZOOM-session – please register to receive login-data in due time!
Login from 12:00 on, talk 12:15 – 12:45 + Q&A and open discussion…

Abstract:

Microelectromechanical systems (MEMS) are part of a large number of products used in everyday life. Due to their often large number of units, their optimization and further development is of great economic and ecological importance.

In this talk, a method of laser-based, non-contact high-frequency ultrasonic characterization, developed specifically for microsystems, will be presented.

The characterization of electroacoustic filters (BAW filters), which are an integral part of cell phones and telecommunication infrastructure, serves as a concrete application example.

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The Research Center for Non-Destructive Testing GmbH is member of the UAR Innovation Network and is supported by the strategic economic- and research program "Innovative Upper Austria 2020" of the province of Upper Austria. The project MiCi is supported by the federal government of Upper Austria and the European Regional Development Fund (EFRE) in the framework of the EU-program IWB2020.