Metrology and material characterization of Microelectromechanical Systems (MEMS) with high frequency ultrasound

  • Dr. Martin Ryzy
    Senior Scientist Acoustics, RECENDT

Language of the talk: ENGLISH
Duration: approx. 30 min.

Microelectromechanical systems (MEMS) are part of a large number of products used in everyday life. Due to their often large number of units, their optimization and further development is of great economic and ecological importance.

In this talk, a method of laser-based, non-contact high-frequency ultrasonic characterization, developed specifically for microsystems, will be presented.

The characterization of electroacoustic filters (BAW filters), which are an integral part of cell phones and telecommunication infrastructure, serves as a concrete application example.

Language: ENGLISH

Recording of the talk:

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